Inline Linescanner for Lifetime and Resistivity
MDPlinescan is designed as an easy to integrate OEM unit for integration into a variety of automated inspection lines. Key measurements are carrier lifetime scans on the fly. Samples are usually carried by a conveyor belt or robot system underneath the measurement head. Application examples range from brick to wafer inspection with measurement speed of less than one second per wafer. Incoming material quality investigation in cell production lines are frequent application cases as well as process quality check after passivation and diffusion, within many other specialised application possibilities. Easy to integrate only ethernet connection and power is needed.
Includes additional resistivity measurement option.
- Measurement of minority carrier lifetime and resistivity linescans at µ-PCD or steady state excitation conditions are in the focus of this small tool.
- OEM unit for the integration in production lines for multi- or monocrystalline silicon wafers at different preparation stages up to devices, bricks or ingots.
- Small size and standard automation interfaces allows for easy integration. Focus is put on long reliability and precision of measurement results.