Reflection and Transmission Inline Monitoring RT Inline
Highest speed
Due to the internal reference technique, no external reference measurement on a separate position is necessary. That guarantees highest speed for sequential multiple point measurements.
Multiple head set-up
Up to 7 sensor heads are driven by one controller, providing a cost effective solution for uniformity monitoring.
SENTECH advanced software
The easy-to-use, recipe oriented FTP software includes a large library of predefined applications that fit the requirements of
The RT inline measurement system is designed for inline quality control of deposition processes. The method is based on SENTECH well known Film Thickness Probe FTPadv for measuring reflectance and film thickness. It operates in the spectral range of
By RT inline, the uniformity of TCO, absorber and buffer layer depositions on large glass panels or plastic foils can be monitored without impairment. Film thickness and reflectivity measurement is done by fixed installed sensor heads above the glass panel during its transportation from the deposition system to the next process station.
Up to seven sensors can be operated by one controller making the RT inline an cost effective, flexible, and productive inline measurement tool. An optional ultrasonic sensor controls the distance between heads and glass platform to exclude wrong measurements.
SENTECH recipe
Recipes include:
Measurement task
Sample model
Fitting parameters
Software interface settings
driven FTP software FTPadv Expert comprises a comprehensive package of predefined ready-to-use applications. It offers an optional software interface to transfer data from the measurement system to the host computer. So, measurements can be started manually or automatically by a signal from the host computer or conveyor.
Recipes developed using SENTECH SENresearch spectroscopic ellipsometer can be transferred directly to the RT inline. Based on such spectroscopic data, even complex layer stacks can be measured inline.
The RT inline measurement system is designed for inline quality control of deposition processes. The method is based on SENTECH well known Film Thickness Probe FTPadvfor measuring reflectance and film thickness. It operates in the spectral range of
By RT inline, the uniformity of TCO, absorber and buffer layer depositions on large glass panels or plastic foils can be monitored without impairment. Film thickness and reflectivity measurement is done by fixed installed sensor heads above the glass panel during its transportation from the deposition system to the next process station.
Up to seven sensors can be operated by one controller making the RT inline an cost effective, flexible, and productive inline measurement tool. An optional ultrasonic sensor controls the distance between heads and glass platform to exclude wrong measurements.
SENTECH recipe
Recipes include:
Measurement task
Sample model
Fitting parameters
Software interface settings
driven FTP software FTPadv Expert comprises a comprehensive package of predefined ready-to-use applications. It offers an optional software interface to transfer data from the measurement system to the host computer. So, measurements can be started manually or automatically by a signal from the host computer or conveyor.
Recipes developed using SENTECH SENresearch spectroscopic ellipsometer can be transferred directly to the RT inline. Based on such spectroscopic data, even complex layer stacks can be measured inline.
