Automated spectroscopic ellipsometer SENDURO®
Auto-alignment
The fully automated spectroscopic ellipsometer SENDURO® relieves the user from manually aligning the sample by height and tilt required for highly precise and repeatable ellipsometric measurements. The patented automatic alignment sensor strongly reduces operation errors, works for transparent and reflective samples, and makes automatic maps possible even on bent wafers.
Easy operation
The recipe
A recipe includes:
Hardware settings
Sample alignment
Modeling
Fitting
Reporting
mode is perfectly suited for routine applications in production, process monitoring as well as
Step Scan Analyzer principle
The Step Scan Analyzer principle is a unique feature of SENTECH ellipsometer family. The total time to analyze a sample takes only a few seconds.
The SENDURO® measures refractive index and thickness of single films and layer stacks on transparent and reflective substrates. High sample throughput rate, minimized installation effort, and low cost of maintenance are the real economic advantages of the SENDURO® mapping tool. The mapping features predefined or user defined patterns, extensive statistics, and graphical display of data.
The SENDURO® represents the SENTECH automated, small footprint, and compact design ellipsometer. The table top instrument comprises the ellipsometer optics, automatic tilt and height sensor, motorized sample stage, and controller electronics, all combined in one compact housing. For highest throughput cassette loading is offered for up to
The SENDURO® excels in industrial applications with its sample throughput rate, easy operation, and auto-alignment. ApplicationsPredefined applications for:
Dielectric films
Semiconductor films
Optical coatings
Layer stacks for flat panels and crystalline Si solar cells
Organic films on transparent and absorbing substrates
Thin film characterization
in R & D
range from dielectric films on semiconductors to multi-layer optical coatings on glass.
The SENDURO® software features a recipe mode and an engineering mode. The recipe mode
SpectraRay/3 recipe mode: Recipe selection is dedicated to easy execution of repetitive applications. Password controlled user login allows for different excess levels. In interactive mode
SpectraRay/3 interactive mode: Modeling, ellipsometric measurements are enhanced by an interactive, guiding graphic user interface. Furthermore, it is possible to modify already existing recipes or to set-up new recipes using the large database of materials and dispersion models.
