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SENTECH booth SEMICON 2017

In April 2017 two of the major exhibition highlights for SENTECH took place in China. The SEMICON China 2017 was a must attend event for us.The SNEC 2017 PV Power EXPO which is the world leading photovoltaic exhibition was attended by SENTECH as well.The presentation of new plasma etching and deposition applications to the Chinese market as well as the promotion of the newly launched SENperc PV were the highlights of the two exhibitions. →read more

Plasma_Seminar_2017_03_09

SENTECH seminar Plasma Process Technology 2017 was once more a successful event to exchange knowledge about plasma tools and their applications. Invited speakers from industry and science gave presentations about etching, PECVD and PEALD and shared their experience with different applications. Current topics like homogeneous deposition, low-damage and high aspect ratio etching were discussed. →read more

ICP-RIE Plasma Etching:

Plasma_cryogenicSiPlasma_lithographyPlasma etching result of VCSEL structure using Ar-Cl2 gas mixtureEtching process result of Si-DRIE (SF6-C4F8-O2) post O2 cleanPlasma etching result of SF6-C4F8 based gas chopping process(IAP-Jena)ICP PECVD TEOS SiO2 film step coverage over Si ridge(IISB-Erlangen)ICP RIE result of SF6O2-C4F8-based Si gas chopping process

Upcoming Events:

Headbanner_BALD-Conference_2017

Headbanner_SEMIexpo_Russia_2017

Headbanner_Intersolar_2017

Headbanner_LWoP_2017

Headbanner_ALD-Conference_2017

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SENTECH
Instruments GmbH

Schwarzschildstr. 2
12489 Berlin
Germany

Phone: +49 (0)30 63 92 55 20
Fax: +49 (0)30 63 92 55 22
Email: info@sentech.de

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»Construction Engineer
»Division Manager for
Plasma Process Technology
»International Sales Manager
»Service Engineer
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German sales office:
SENTECH GmbH

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Chinese sales office:
SENTECH China


Worldwide sales partners:
→ SENTECH Distributor NetworklinkMG